Fabrication process of the microgripper based on silicon bulk micromachining is designed . effects of footing and lag in icp and bonding failure are discussed as emphases . the cantilever type gripping finger that is 6 m wide and 5471 m in equivalent length was released successfully characteristic of comb - drive electrostatically actuated microgripper is tested 进行了大量的工艺试验和分析，特别对大深宽比的超长长度悬臂梁型夹持臂及梳状驱动结构进行了深入研究，解决了微细加工工艺中的关键技术。
